High-performance solid-state on-chip supercapacitors based on Si nanowires coated with ruthenium oxide via atomic layer deposition
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Power Sources"
DOI: 10.1016/j.jpowsour.2016.11.093
Abstract: Abstract Solid-state on-chip supercapacitors based on ruthenium oxide coated silicon nanowires were fabricated using a process that is compatible with silicon integrated circuit processing. Ordered arrays of silicon nanowires were fabricated using metal-assisted anodic etching… read more here.
Keywords: solid state; state; state chip; chip supercapacitors ... See more keywords
High-Performance On-Chip Supercapacitors Based on Mesoporous Silicon Coated with Ultrathin Atomic Layer-Deposited In2O3 Films.
Sign Up to like & getrecommendations! Published in 2019 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.8b17093
Abstract: On-chip supercapacitors have attracted considerable attention because of their high power density, long cycling life, and compatibility with integrated circuits. One critical drawback that restricts their practical application is the low energy density. In this… read more here.
Keywords: in2o3 films; atomic layer; mesoporous silicon; chip supercapacitors ... See more keywords