Equivalent circuit fitting method for microwave characterisation of low-k dielectric thin films
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DOI: 10.1088/1361-6501/ad6342
Abstract: A new equivalent circuit fitting analysis scheme is proposed to analyse the measured data of test structures originally developed to characterise high-κ dielectrics at frequencies up to 5 GHz (Zhengxiang et al 1998 IEEE Trans.… read more here.
Keywords: circuit; original method; circuit fitting; characterisation low ... See more keywords