Fabrication of single-mode circular optofluidic waveguides in fused silica using femtosecond laser microfabrication
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DOI: 10.1016/j.optlastec.2021.107118
Abstract: Abstract We demonstrate fabrication of single-mode circular optofluidic waveguides in fused silica glass substrates using femtosecond (fs) laser assisted chemical etching based on slit beam shaping. The fabrication procedure consists of four steps: slit-assisted fs… read more here.
Keywords: circular optofluidic; fabrication; single mode; fused silica ... See more keywords