Novel Fabrication Technology for Clamped Micron-Thick Titanium Diaphragms Used for the Packaging of an Implantable MEMS Acoustic Transducer
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DOI: 10.3390/mi13010074
Abstract: Micro-Electro-Mechanical Systems (MEMS) acoustic transducers are highly sophisticated devices with high sensing performance, small size, and low power consumption. To be applied in an implantable medical device, they require a customized packaging solution with a… read more here.
Keywords: clamped micron; fabrication technology; novel fabrication; technology clamped ... See more keywords