Articles with "cleaning process" as a keyword



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Recent development of photocatalytic nanomaterials in mixed matrix membrane for emerging pollutants and fouling control, membrane cleaning process.

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Published in 2021 at "Chemosphere"

DOI: 10.1016/j.chemosphere.2021.130891

Abstract: Membrane-based separation is an area of extensive research in wastewater treatment, which includes the control of pollution and reuse of water. The fabrication and modification membranes for prevention and reduction of pollution to provide quality… read more here.

Keywords: control; process; recent development; membrane ... See more keywords
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Study on particle removal during the Co post-CMP cleaning process

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Published in 2021 at "Colloids and Surfaces A: Physicochemical and Engineering Aspects"

DOI: 10.1016/j.colsurfa.2021.127189

Abstract: Abstract The cleaning process of a cobalt surface after the chemical mechanical polishing (CMP) process is indispensable for removing a large amount of residue. In this work, the particle removal efficiency of three target solutions… read more here.

Keywords: cleaning process; particle removal; process; microscopy ... See more keywords
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Optimization of cleaning process parameters to remove abrasive particles in post-Cu CMP cleaning

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Published in 2018 at "Journal of Semiconductors"

DOI: 10.1088/1674-4926/39/12/126002

Abstract: The cleaning of copper interconnect chemical mechanical polishing (CMP) is a key process in integrated circuits (ICs) fabrication. Colloidal silica, which is used as the abrasive material in copper CMP slurry, is considered as the… read more here.

Keywords: abrasive particles; cleaning process; optimization cleaning; cmp ... See more keywords
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Application of plasma cleaning process in MEMS filter micro-assembly

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Published in 2020 at "Modern Physics Letters B"

DOI: 10.1142/s0217984920502565

Abstract: To solve the problems of low efficiency and high void rate in the process of the MEMS filter (die) attach and increase the strength of wire bonding between the die and microwave circuit board, plas... read more here.

Keywords: mems filter; application plasma; plasma cleaning; process mems ... See more keywords
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Quick Cleaning Process for Silicon Carbide Chemical Vapor Deposition Reactor

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Published in 2017 at "ECS Journal of Solid State Science and Technology"

DOI: 10.1149/2.0161708jss

Abstract: A quick cleaning process was developed for a silicon carbide chemical vapor deposition reactor. For this purpose, the stability of the susceptor coating film made of pyrolytic carbon was evaluated by means of exposing it… read more here.

Keywords: carbide chemical; silicon carbide; chemical vapor; vapor deposition ... See more keywords
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Data Cleaning Process for mHealth Log Data to Inform Health Worker Performance

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Published in 2022 at "Studies in health technology and informatics"

DOI: 10.3233/shti220664

Abstract: Log data, captured during use of mobile health (mHealth) applications by health providers, can play an important role in informing nature of user engagement with the application. The log data can also be employed in… read more here.

Keywords: health; mhealth; log; log data ... See more keywords
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Remediation Capacity of Different Microalgae in Effluents Derived from the Cigarette Butt Cleaning Process

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Published in 2022 at "Plants"

DOI: 10.3390/plants11131770

Abstract: Microalgal-based remediation is an ecofriendly and cost-effective system for wastewater treatment. This study evaluated the capacity of microalgae in the remediation of wastewater from cleaning process of smoked cigarette butts (CB). At laboratory scale, six… read more here.

Keywords: capacity; remediation capacity; remediation; microalgae ... See more keywords