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Published in 2021 at "Chemosphere"
DOI: 10.1016/j.chemosphere.2021.130891
Abstract: Membrane-based separation is an area of extensive research in wastewater treatment, which includes the control of pollution and reuse of water. The fabrication and modification membranes for prevention and reduction of pollution to provide quality…
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Keywords:
control;
process;
recent development;
membrane ... See more keywords
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Published in 2021 at "Colloids and Surfaces A: Physicochemical and Engineering Aspects"
DOI: 10.1016/j.colsurfa.2021.127189
Abstract: Abstract The cleaning process of a cobalt surface after the chemical mechanical polishing (CMP) process is indispensable for removing a large amount of residue. In this work, the particle removal efficiency of three target solutions…
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Keywords:
cleaning process;
particle removal;
process;
microscopy ... See more keywords
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Published in 2018 at "Journal of Semiconductors"
DOI: 10.1088/1674-4926/39/12/126002
Abstract: The cleaning of copper interconnect chemical mechanical polishing (CMP) is a key process in integrated circuits (ICs) fabrication. Colloidal silica, which is used as the abrasive material in copper CMP slurry, is considered as the…
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Keywords:
abrasive particles;
cleaning process;
optimization cleaning;
cmp ... See more keywords
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Published in 2020 at "Modern Physics Letters B"
DOI: 10.1142/s0217984920502565
Abstract: To solve the problems of low efficiency and high void rate in the process of the MEMS filter (die) attach and increase the strength of wire bonding between the die and microwave circuit board, plas...
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Keywords:
mems filter;
application plasma;
plasma cleaning;
process mems ... See more keywords
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Published in 2017 at "ECS Journal of Solid State Science and Technology"
DOI: 10.1149/2.0161708jss
Abstract: A quick cleaning process was developed for a silicon carbide chemical vapor deposition reactor. For this purpose, the stability of the susceptor coating film made of pyrolytic carbon was evaluated by means of exposing it…
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Keywords:
carbide chemical;
silicon carbide;
chemical vapor;
vapor deposition ... See more keywords
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Published in 2022 at "Studies in health technology and informatics"
DOI: 10.3233/shti220664
Abstract: Log data, captured during use of mobile health (mHealth) applications by health providers, can play an important role in informing nature of user engagement with the application. The log data can also be employed in…
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Keywords:
health;
mhealth;
log;
log data ... See more keywords
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Published in 2022 at "Plants"
DOI: 10.3390/plants11131770
Abstract: Microalgal-based remediation is an ecofriendly and cost-effective system for wastewater treatment. This study evaluated the capacity of microalgae in the remediation of wastewater from cleaning process of smoked cigarette butts (CB). At laboratory scale, six…
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Keywords:
capacity;
remediation capacity;
remediation;
microalgae ... See more keywords