An Efficient Binary Integer Programming Model for Residency Time-Constrained Cluster Tools With Chamber Cleaning Requirements
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DOI: 10.1109/tase.2021.3122576
Abstract: Cluster tools play a significant role in the entire process of wafer fabrication. As the width of circuits in semiconductor chips shrinks down to less than 10nm, strict operational constraints are imposed on the operations… read more here.
Keywords: cleaning requirements; time; chamber cleaning; cluster tools ... See more keywords