Development of eco-friendly cleaning solution for industrial silicon wafer solar cell
Sign Up to like & getrecommendations! Published in 2020 at "Materials Science in Semiconductor Processing"
DOI: 10.1016/j.mssp.2019.104764
Abstract: Abstract In the cleaning process to fabricate silicon solar cell wafers, removal of stains and metal impurities on the wafer surface is important since they can affect the surface texturing of silicon solar cells. The… read more here.
Keywords: ratio polyoxyethylene; polyoxyethylene lauryl; eco friendly; cleaning solution ... See more keywords
Degradation of inhibitor in alkaline cleaning solution for post-Cu CMP cleaning
Sign Up to like & getrecommendations! Published in 2018 at "Surface and Coatings Technology"
DOI: 10.1016/j.surfcoat.2018.02.039
Abstract: Abstract In this current work, the degradation of the commercial alkaline cleaning solution for post-Cu chemical mechanical planarization (CMP) cleaning process was systemically investigated. According to the results of electrochemical measurements and X-ray photoelectron spectroscopy,… read more here.
Keywords: solution post; degradation; cleaning solution; alkaline cleaning ... See more keywords