Articles with "cluster beam" as a keyword



Soft and flexible gold microelectrodes by supersonic cluster beam deposition and femtosecond laser processing

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Published in 2021 at "Microelectronic Engineering"

DOI: 10.1016/j.mee.2020.111478

Abstract: Abstract Soft and flexible microelectrodes are fabricated and patterned in a novel approach integrating supersonic cluster beam deposition (SCBD) of gold nanoparticles onto Polydimethylsiloxane (PDMS) followed by femtosecond (fs) laser processing. SCBD of gold nanoparticles… read more here.

Keywords: cluster beam; supersonic cluster; femtosecond laser; gold ... See more keywords