Digital Twin-Based Optimization of Operational Parameters for Cluster Tools in Semiconductor Manufacturing
Sign Up to like & getrecommendations! Published in 2024 at "IEEE Access"
DOI: 10.1109/access.2024.3450869
Abstract: Manufacturing and supply chain management are becoming increasingly important in the semiconductor industry. Cluster tools are essential equipment in semiconductor production and are used for microscopic operations, such as the surface treatment of wafers. In… read more here.
Keywords: operational parameters; digital twin; semiconductor manufacturing; parameters cluster ... See more keywords
An Efficient Binary Integer Programming Model for Residency Time-Constrained Cluster Tools With Chamber Cleaning Requirements
Sign Up to like & getrecommendations! Published in 2022 at "IEEE Transactions on Automation Science and Engineering"
DOI: 10.1109/tase.2021.3122576
Abstract: Cluster tools play a significant role in the entire process of wafer fabrication. As the width of circuits in semiconductor chips shrinks down to less than 10nm, strict operational constraints are imposed on the operations… read more here.
Keywords: cleaning requirements; time; chamber cleaning; cluster tools ... See more keywords
Virtual Cell-Based Scheduling Approach to Single-Robotic-Arm Cluster Tools Subject to Wafer Residency Time Constraints
Sign Up to like & getrecommendations! Published in 2025 at "IEEE Transactions on Automation Science and Engineering"
DOI: 10.1109/tase.2024.3349380
Abstract: Scheduling single-robotic-arm cluster tools subject to wafer residency time constraints has received much attention. Compared to some scheduling strategies that use all processing modules (PMs) to process wafers, it is much more challenging to schedule… read more here.
Keywords: time; arm cluster; cluster tools; single robotic ... See more keywords
Scheduling Single-Arm Cluster Tools With an Equipment Front-End Module Subject to Wafer Residency Time Constraints
Sign Up to like & getrecommendations! Published in 2025 at "IEEE Transactions on Automation Science and Engineering"
DOI: 10.1109/tase.2024.3507854
Abstract: Semiconductor manufacturing widely employs cluster tools that comprise three critical components: a vacuum module (VM), a loadlock module (LLM), and an equipment front-end module (EFEM). In operating such tools, LLM plays a pivotal role. Additionally,… read more here.
Keywords: time; cluster; wafer residency; time constraints ... See more keywords
Efficient Approach to Failure Response of Process Module in Dual-Arm Cluster Tools With Wafer Residency Time Constraints
Sign Up to like & getrecommendations! Published in 2021 at "IEEE Transactions on Systems, Man, and Cybernetics: Systems"
DOI: 10.1109/tsmc.2019.2899590
Abstract: In semiconductor manufacturing, a process module (PM) failure in cluster tools (CTs) happens from time to time. To effectively operate a CT, such a failure should be handled in a proper and timely manner. This… read more here.
Keywords: time; response; process module; failure ... See more keywords
Closing-Down Optimization for Single-Arm Cluster Tools Subject to Wafer Residency Time Constraints
Sign Up to like & getrecommendations! Published in 2021 at "IEEE Transactions on Systems, Man, and Cybernetics: Systems"
DOI: 10.1109/tsmc.2020.2964032
Abstract: A kind of facilities for wafer fabrication, cluster tools (CTs) need to close down to an idle state from time to time because of periodical maintenance and switches from one type of lots to another,… read more here.
Keywords: residency time; time constraints; cluster tools; time ... See more keywords