Fully Integrated Bidirectional CMOS-MEMS Flow Sensor With Low Power Pulse Operation
Sign Up to like & getrecommendations! Published in 2019 at "IEEE Sensors Journal"
DOI: 10.1109/jsen.2019.2891784
Abstract: Leveraging More-than-Moore technology, we demonstrate an integrated CMOS MEMS flow sensor via a very compact system on chip (SoC) that can sense the bidirectional N2 gas flow. Our SoC features a very low-noise instrumentation amplifier… read more here.
Keywords: flow sensor; mems flow; cmos mems; low power ... See more keywords
CMOS MEMS Thermal Flow Sensor With Enhanced Sensitivity for Heating, Ventilation, and Air Conditioning Application
Sign Up to like & getrecommendations! Published in 2021 at "IEEE Transactions on Industrial Electronics"
DOI: 10.1109/tie.2020.2984446
Abstract: In this article, by using 0.35-μm two-polysilicon four-metal CMOS MEMS technology, a thermoresistive micro calorimetric flow (TMCF) sensor with two packaging designs is systematically investigated: Open-space (O-type) and probe-with-channel (P-type) designs. In comparison with the… read more here.
Keywords: flow sensor; sensor; cmos mems; sensitivity ... See more keywords
Implementation of a CMOS/MEMS Accelerometer with ASIC Processes
Sign Up to like & getrecommendations! Published in 2019 at "Micromachines"
DOI: 10.3390/mi10010050
Abstract: This paper presents the design, simulation and mechanical characterization of a newly proposed complementary metal-oxide semiconductor (CMOS)/micro-electromechanical system (MEMS) accelerometer. The monolithic CMOS/MEMS accelerometer was fabricated using the 0.18 μm application-specific integrated circuit (ASIC)-compatible CMOS/MEMS… read more here.
Keywords: accelerometer asic; cmos; cmos mems; implementation cmos ... See more keywords
A CMOS-MEMS Pixel Sensor for Thermal Neutron Imaging
Sign Up to like & getrecommendations! Published in 2023 at "Micromachines"
DOI: 10.3390/mi14050952
Abstract: A monolithic pixel sensor with high spatial granularity (35 × 40 μm2) is presented, aiming at thermal neutron detection and imaging. The device is made using the CMOS SOIPIX technology, with Deep Reactive-Ion Etching post-processing… read more here.
Keywords: mems pixel; cmos mems; pixel sensor; thermal neutron ... See more keywords