A Sub-0.1°/h Bias-Instability Split-Mode MEMS Gyroscope With CMOS Readout Circuit
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DOI: 10.1109/jssc.2018.2844285
Abstract: This paper describes a split-mode tuning fork MEMS gyroscope with CMOS readout circuit. The gyroscope achieves 0.008°/ $\surd \text{h}$ angle random walk (ARW) and 0.08°/h bias instability (BI). The noise and phase requirements of the… read more here.
Keywords: cmos readout; split mode; readout circuit; circuit ... See more keywords