Fabrication and Characterization of a Wideband Low-Frequency CMUT Array for Air-Coupled Imaging
Sign Up to like & getrecommendations! Published in 2020 at "IEEE Sensors Journal"
DOI: 10.1109/jsen.2020.3007068
Abstract: The capacitive micro-machined ultrasonic transducer (CMUT) has a good acoustic matching with air. In this paper, a 16-element CMUT array for airborne application is designed and fabricated by SOI wafer bonding process. All the CMUT… read more here.
Keywords: cmut; cmut array; air; coupled imaging ... See more keywords
Fabrication of 2-D Capacitive Micromachined Ultrasonic Transducer (CMUT) Array through Silicon Wafer Bonding
Sign Up to like & getrecommendations! Published in 2022 at "Micromachines"
DOI: 10.3390/mi13010099
Abstract: Capacitive micromachined ultrasound transducers (CMUTs) have broad application prospects in medical imaging, flow monitoring, and nondestructive testing. CMUT arrays are limited by their fabrication process, which seriously restricts their further development and application. In this… read more here.
Keywords: transducer; capacitive micromachined; silicon; cmut array ... See more keywords