Realization of preferential (100) oriented AlN thin films on Mo coated Si substrate using reactive RF magnetron sputtering
Sign Up to like & getrecommendations! Published in 2021 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2021.149308
Abstract: Abstract a-axis (100) oriented Aluminium Nitride (AlN) favours transverse acoustic wave applications. We have been able to realize preferential (100) oriented AlN films on Molybdenum (Mo) coated Si substrate using reactive RF magnetron sputtering. X-ray… read more here.
Keywords: oriented aln; coated substrate; spectroscopy; 100 oriented ... See more keywords
A semianalytical and finite-element solution to the unbonded contact between a frictionless layer and an FGM-coated half-plane
Sign Up to like & getrecommendations! Published in 2019 at "Mathematics and Mechanics of Solids"
DOI: 10.1177/1081286517744600
Abstract: In this work, we examine the receding contact between a homogeneous elastic layer and a half-plane substrate reinforced by a functionally graded coating. The material properties of the coating are allowed to vary exponentially along… read more here.
Keywords: finite element; receding contact; half plane; layer ... See more keywords