Chemical vapor deposition of hexagonal boron nitride on metal-coated wafers and transfer-free fabrication of resistive switching devices
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DOI: 10.1088/2053-1583/ab1783
Abstract: Due to their outstanding electronic and physical properties, two-dimensional (2D) materials have attracted much interest for the fabrication of solid-state microelectronic devices. Among all methods to synthesize 2D materials, chemical vapor deposition (CVD) is the… read more here.
Keywords: hexagonal boron; metal; vapor deposition; coated wafers ... See more keywords