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Published in 2020 at "Wear"
DOI: 10.1016/j.wear.2020.203352
Abstract: Abstract According to the design requirement of friction pairs in MicroElectroMechanical Systems (MEMS), four kinds of hard coatings TiN, TiCN, AlTiN and diamond like carbon (DLC) were selected to form 16 kinds of combinations. The…
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Keywords:
dry friction;
friction;
friction pairs;
wear ... See more keywords