Imaging scatterometer for observing in situ changes to optical coatings during air annealing.
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DOI: 10.1364/ao.476979
Abstract: Annealing of amorphous optical coatings has been shown to generally reduce optical absorption, optical scattering, and mechanical loss, with higher temperature annealing giving better results. The achievable maximum temperatures are limited to the levels at… read more here.
Keywords: imaging scatterometer; observing situ; damage; scatterometer observing ... See more keywords