Tantalum oxide and silicon oxide mixture coatings deposited using microwave plasma assisted co-sputtering for optical mirror coatings in gravitational wave detectors.
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DOI: 10.1364/oic.2022.wb.2
Abstract: This work presents the characterization of the optical and mechanical properties of thin films based on (T a 2 O 5)1-x (S i O 2)x mixed oxides deposited by microwave plasma assisted co-sputtering, including post-annealing… read more here.
Keywords: coatings gravitational; microwave plasma; assisted sputtering; plasma assisted ... See more keywords