Nanometer-scale etching of CoFeB thin films using pulse-modulated high density plasma
Sign Up to like & getrecommendations! Published in 2018 at "Current Applied Physics"
DOI: 10.1016/j.cap.2018.04.022
Abstract: Abstract Pulse-modulated inductively coupled plasma reactive ion etching of nanometer-scale patterned CoFeB thin films was performed in CH 4 /O 2 /Ar gas mixture. As the pulse on-off duty ratio decreased, the etch selectivity of… read more here.
Keywords: cofeb; thin films; nanometer scale; cofeb thin ... See more keywords
Interplay of composition and anisotropy on evolution of microstructural, static and dynamic magnetic properties of CoFeB thin films on annealing
Sign Up to like & getrecommendations! Published in 2018 at "Journal of Alloys and Compounds"
DOI: 10.1016/j.jallcom.2018.05.322
Abstract: Abstract The crystallization of CoFeB electrode is essential for achieving high tunneling magnetoresistance (TMR) in magnetic tunnel junctions (MTJs) with MgO barrier. In this study, we systematically investigated the influence of annealing on the structural… read more here.
Keywords: thin films; cofeb thin; magnetic properties; crystallization ... See more keywords