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Published in 2021 at "Measurement Science and Technology"
DOI: 10.1088/1361-6501/abfe83
Abstract: This contribution presents experimental and simulation results of a tiltable line scanning low coherence interferometer applied for form measurement of spherical and aspherical objects with a diameter of up to 300 mm. The region of…
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Keywords:
form measurement;
coherence interferometer;
line scanning;
tiltable line ... See more keywords
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Published in 2022 at "Optics letters"
DOI: 10.1364/ol.460708
Abstract: A high-aperture low-coherence interferometer with a diffraction reference wave based on a tipped single-mode optical fiber was proposed and investigated. Due to the usage of the central least-aberrated region of the diffracted wavefront, the interferometer…
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Keywords:
high aperture;
interferometer;
aperture;
low coherence ... See more keywords