Coherence scanning interferometry allows accurate characterization of micrometric spherical particles contained in complex media.
Sign Up to like & getrecommendations! Published in 2019 at "Ultramicroscopy"
DOI: 10.1016/j.ultramic.2019.112859
Abstract: Characterizing very small particles, from a few dozen micrometers to the nanometric scale, is a very challenging application in a wide range of domains. In this work, we demonstrate, through the recovery of silica and… read more here.
Keywords: coherence scanning; interferometry allows; characterization; scanning interferometry ... See more keywords
Applications of model-based transparent surface films analysis using coherence-scanning interferometry
Sign Up to like & getrecommendations! Published in 2017 at "Optical Engineering"
DOI: 10.1117/1.oe.56.11.111709
Abstract: Abstract. Surface metrology must increasingly contend with submicron films, whose prevalence now extends to products well beyond semiconductor devices. For optical technologies such as coherence-scanning interferometry (CSI), transparent submicron films pose a dual challenge: film… read more here.
Keywords: topography; model based; scanning interferometry; surface ... See more keywords
3D profiling of rough silicon carbide surfaces by coherence scanning interferometry using a femtosecond laser.
Sign Up to like & getrecommendations! Published in 2018 at "Applied optics"
DOI: 10.1364/ao.57.002584
Abstract: We test an erbium-doped fiber femtosecond laser for its potential as a light source for a coherence scanning interferometer for large field-of-view profiling of rough silicon carbide (SiC) surfaces. This infrared fiber pulse laser is… read more here.
Keywords: rough silicon; coherence; femtosecond laser; profiling rough ... See more keywords
Coherence scanning interferometry with a focus-tunable lens.
Sign Up to like & getrecommendations! Published in 2019 at "Applied optics"
DOI: 10.1364/ao.58.000g91
Abstract: Coherence scanning interferometry is an established optical method that is able to measure the shape of objects with high precision. The surface of the object to be measured can be both optically smooth and optically… read more here.
Keywords: coherence scanning; tunable lens; scanning interferometry; focus tunable ... See more keywords