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Published in 2017 at "Journal of Mechanical Science and Technology"
DOI: 10.1007/s12206-017-1036-x
Abstract: Microcoils are essential components in magnetic sensors made using Micro-electro-mechanical systems (MEMS) technology. Nonspiral microcoils have fabrication advantages over conventional spiral coils and can be effectively used in MEMS micro sensors for generation and detection…
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Keywords:
modeling simulation;
spiral coil;
coil magnetic;
non spiral ... See more keywords