In-Plane Optical Beam Collimation Using a Three-Dimensional Curved MEMS Mirror †
Sign Up to like & getrecommendations! Published in 2017 at "Micromachines"
DOI: 10.3390/mi8050134
Abstract: The collimation of free-space light propagating in-plane with respect to the substrate is an important performance factor in optical microelectromechanical systems (MEMS). This is usually carried out by integrating micro lenses into the system, which… read more here.
Keywords: three dimensional; collimation using; collimation; optical beam ... See more keywords