A new MEMS based variable capacitor using electrostatic vertical comb drive actuator and auxiliary cantilever beams
Sign Up to like & getrecommendations! Published in 2019 at "Microsystem Technologies"
DOI: 10.1007/s00542-019-04293-7
Abstract: We have proposed a new wide tunable MEMS variable capacitor. In the proposed structure, an electrostatic vertical comb drive actuator is used to extend the tuning range. Moreover, the auxiliary cantilever-beams are used in the… read more here.
Keywords: variable capacitor; drive actuator; actuator; comb drive ... See more keywords
Design, modelling and characterization of comb drive MEMS gap-changeable differential capacitive accelerometer
Sign Up to like & getrecommendations! Published in 2021 at "Measurement"
DOI: 10.1016/j.measurement.2020.108377
Abstract: Abstract This paper presents design optimization, numerical modelling, fabrication and characterization of a single-axis comb drive MEMS gap-changeable differential capacitive accelerometer with a compact footprint of 2 mm × 2 mm. High sensitivity is achieved by optimizing the ratio… read more here.
Keywords: mems gap; gap changeable; sensitivity; drive mems ... See more keywords
Nano-optomechanical characterization of surface-plasmon-based tunable filter integrated with comb-drive actuator
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/aa5aa7
Abstract: We report a tunable plasmonic color filter consisting of a metamaterial periodic grating and microelectromechanical systems (MEMS) actuator. An aluminum subwavelength grating is integrated with electrostatic comb-drive actuators to expand the metal subwavelength period, which… read more here.
Keywords: tunable filter; nano optomechanical; surface; filter ... See more keywords
Silicon optical add-drop filters with tunable power coupling using MEMS comb drive actuators
Sign Up to like & getrecommendations! Published in 2017 at "Optical Engineering"
DOI: 10.1117/1.oe.56.7.076110
Abstract: Abstract. We develop an optical ring resonator with tunable coupling coefficients for use in wavelength division multiplexing routers. The coupling coefficients of the resonator are precisely tuned by the utilization of an electrostatic comb drive… read more here.
Keywords: power; resonator; mems actuator; comb drive ... See more keywords
Linear variable optical attenuators with shaped-finger comb-drive actuators.
Sign Up to like & getrecommendations! Published in 2020 at "Applied optics"
DOI: 10.1364/ao.59.000277
Abstract: A design method is proposed for variable optical attenuators (VOAs), aiming at linear attenuation-voltage characteristics, and verified by finite element analysis. Devices of interest are planar VOAs based on microelectromechanical systems technology, with either a… read more here.
Keywords: drive actuators; variable optical; linear variable; comb drive ... See more keywords
Bifurcation Analysis on the Periodic Response of a Comb Drive MEMS Resonator
Sign Up to like & getrecommendations! Published in 2022 at "Micromachines"
DOI: 10.3390/mi13020148
Abstract: In this paper, we investigate the bifurcation characteristics of a comb drive MEMS resonator. The method of averaging and the residue theorem are used to get a more accurate analytical solution for the periodic response.… read more here.
Keywords: response; periodic response; comb drive; bifurcation ... See more keywords