Dynamic behaviours of double-ended tuning fork based comb-driven microelectromechanical resonators for modulating magnetic flux synchronously
Sign Up to like & getrecommendations! Published in 2021 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/ac388e
Abstract: Microelectromechanical system (MEMS) resonators have been widely used in the magneto-resistive (MR) sensor for modulating the magnetic flux to enhance the detection limit. However, the manufacturing tolerances in MEMS fabrication processes make it challenging to… read more here.
Keywords: based comb; comb driven; magnetic flux; tuning fork ... See more keywords