Combinatorial study of low-refractive Mg–F–Si–O nano-composites deposited by magnetron co-sputtering from compound targets
Sign Up to like & getrecommendations! Published in 2018 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2017.10.229
Abstract: Abstract Deposition of nano-composite Mg–F–Si–O films on optical grade silica glass was studied employing RF magnetron co-sputtering from magnesium fluoride (MgF2) and fused silica (SiO2) targets. The aim was to obtain a stable and reliable… read more here.
Keywords: magnetron sputtering; microscopy; combinatorial study; low refractive ... See more keywords