LAUSR

Calibration of Compact Resist Model Through CNN Training

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2 Published in 2023 at "IEEE Transactions on Semiconductor Manufacturing"

DOI: 10.1109/tsm.2023.3267670

Abstract: We notice that the compact resist model can be mapped to a simple CNN (convolutional neural network): convolutional layer corresponds to convolutions between input images and resist kernels, and a fully connected layer can model… read more here.

Keywords: compact resist; resist model; cnn training; model ... See more keywords