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Published in 2019 at "Microelectronics Reliability"
DOI: 10.1016/j.microrel.2019.113499
Abstract: Abstract Space-related electronics contain different types of oxide isolations which are the crucial factor resulting in device degradation and failure. Previous studies show that the local oxidation of silicon (LOCOS) isolation Silicon‑germanium heterojunction bipolar transistor…
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Keywords:
comparison holes;
low dose;
sige;
rate ... See more keywords