CMOS compatible athermal silicon photonic filters based on hydrogenated amorphous silicon.
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DOI: 10.1364/oe.446998
Abstract: We report for the first time, wavelength filters with reduced thermal sensitivity, based on a combination of crystalline silicon and hydrogenated amorphous silicon (a-Si:H) waveguides, integrated on the same silicon on an insulator wafer through… read more here.
Keywords: amorphous silicon; athermal silicon; compatible athermal; hydrogenated amorphous ... See more keywords