CMOS-compatible, piezo-optomechanically tunable photonics for visible wavelengths and cryogenic temperatures.
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DOI: 10.1364/oe.27.028588
Abstract: We demonstrate a platform for phase and amplitude modulation in silicon nitride photonic integrated circuits via piezo-optomechanical coupling using tightly mechanically coupled aluminum nitride actuators. The platform, fabricated in a CMOS foundry, enables scalable active… read more here.
Keywords: cryogenic temperatures; compatible piezo; visible wavelengths; piezo optomechanically ... See more keywords