Back-End-of-Line Compatible Transistors for Monolithic 3-D Integration
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DOI: 10.1109/mm.2019.2942978
Abstract: The manufacturers of high-performance logic have been ardent champions of Moore's Law, which has resulted in exponential increase in aerial transistor density to 100 million transistors per square millimeter of silicon real estate. However, it… read more here.
Keywords: end line; compatible transistors; line compatible; integration ... See more keywords