An SOI-based post-fabrication process for compliant MEMS devices
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DOI: 10.1088/1361-6439/ad2f4b
Abstract: Fabricating compliant microelectromechanical system (MEMS) devices is challenging because they are easily damaged during fabrication. This paper presents a fabrication process based on the silicon-on-insulator (SOI) wafer for compliant MEMS devices. In the fabrication process,… read more here.
Keywords: mems devices; fabrication; soi based; compliant mems ... See more keywords