Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages
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DOI: 10.3390/act7010005
Abstract: Micromanipulation is a hot topic due to its enabling role in various research fields. In order to perform a high precision operation at a small scale, compliant mechanisms have been proposed and applied for decades.… read more here.
Keywords: positioning stage; nano positioning; micro nano; compliant micro ... See more keywords