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Published in 2017 at "Microsystem Technologies"
DOI: 10.1007/s00542-016-3178-7
Abstract: Electromigration (EM) evaluation near contact corners in interconnection structures composed of dissimilar materials in particular is becoming increasingly important. A theoretical analysis of the atomic density distribution around a right-angled corner in a passivated line…
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Keywords:
atomic density;
line;
right angled;
composed dissimilar ... See more keywords