Development and Study of Composite Acoustic Resonators with Al/(Al, Sc)N/Mo/Diamond Structure with a High Q Factor in the UHF Range
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DOI: 10.1134/s1063771019030072
Abstract: The paper demonstrates for the first time the possibility of using aluminum nitride–scandium as an effective piezoelectric material in composite acoustic resonators on synthetic diamond substrates. Composite resonators based on an Al/(Al, Sc)N/Mo/(100) diamond piezoelectric… read more here.
Keywords: resonators diamond; composite acoustic; range; structure ... See more keywords
High-shear-velocity Composite Acoustic Materials of AlN/Diamond for Biological MEMS Devices
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DOI: 10.18494/sam.2019.2111
Abstract: Shear horizontal (SH) surface acoustic wave (SAW) sensors formed by combining (100) AlN films with a diamond substrate have been developed in this research. The propagation characteristics of SAW in four composite structures according to… read more here.
Keywords: composite acoustic; acoustic materials; high shear; materials aln ... See more keywords