PZT-Film-Based Piezoelectric Micromachined Ultrasonic Transducer with I-Shaped Composite Diaphragm
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DOI: 10.3390/mi13101597
Abstract: We proposed a PZT-film-based piezoelectric micromachined ultrasonic transducer (pMUT) with an I-shaped composite diaphragm to improve the sensitivity and resonant frequency of pMUTs with the same diaphragm area. The finite element method (FEM) simulation results… read more here.
Keywords: pzt film; composite diaphragm; shaped composite; diaphragm ... See more keywords