Engineering Efficient Acoustic Power Transfer in HBARs and Other Composite Resonators
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DOI: 10.1109/jmems.2020.3009516
Abstract: We present analytic and experimental evidence highlighting the importance of acoustic impedance matching for efficient power transfer in RF-MEMS composite resonators such as high-overtone bulk acoustic mode resonators (HBARs) and thin-film piezoelectric on substrate (TPoS)… read more here.
Keywords: efficient acoustic; power transfer; power; acoustic power ... See more keywords