Varying the Composition of Ferroelectric Films during Ion-Plasma Sputtering: Simulation and Experiment
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DOI: 10.3103/s1062873818030322
Abstract: Varying the elemental composition of ferroelectric thin films of barium strontium titanate, barium zirconate titanate, and barium stannate titanate solid solutions obtained by ion-plasma sputtering of ceramic targets at different pressures of the working gas… read more here.
Keywords: plasma sputtering; composition ferroelectric; ion plasma; composition ... See more keywords