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Published in 2017 at "Superlattices and Microstructures"
DOI: 10.1016/j.spmi.2017.04.024
Abstract: Abstract The Co-doped SiC films were developed by radio frequency-magnetron sputtering. After annealing at high temperatures, the amorphous structure of the films transformed into the structure of 3C SiC lattice and the secondary phase of…
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Keywords:
compounds cosi;
temperature;
doped sic;
structure ... See more keywords