Mixed‐Anion Compounds: An Unexplored Playground for ALD Fabrication
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DOI: 10.1002/admi.202100146
Abstract: For decades the most successful approach towards new inorganic material innovations for next‐generation devices has been to manipulate the cation composition. As this cation‐centric material development is inevitably approaching its saturation, new chemistries are needed… read more here.
Keywords: unexplored playground; compounds unexplored; fabrication; mixed anion ... See more keywords