Influence of process conditions on structural and electrochemical properties of lithium phosphorus oxynitride thin films
Sign Up to like & getrecommendations! Published in 2020 at "Ceramics International"
DOI: 10.1016/j.ceramint.2020.05.251
Abstract: Abstract Lithium phosphorus oxynitride (LiPON) is the most representative solid electrolyte in thin film battery applications. In addition, it has been used as an interfacial protective layer to improve the stability of cathode and anode… read more here.
Keywords: thin films; phosphorus oxynitride; process; process conditions ... See more keywords