Controlling the thermal conductance of silicon nitride membranes at 100 mK temperatures with patterned metal features
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DOI: 10.1063/1.5097173
Abstract: Freestanding micromachined membranes are often used for thermal isolation in electronic devices such as photon sensors. The degree of thermal isolation plays an important role in determining device performance, and so the ability to suppress… read more here.
Keywords: conductance silicon; silicon nitride; nitride membranes; conductance ... See more keywords