Effect of RF sputtering power and vacuum annealing on the properties of AZO thin films prepared from ceramic target in confocal configuration
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DOI: 10.1016/j.mssp.2020.105217
Abstract: Abstract Aluminum-doped zinc oxide (AZO) thin films are deposited on glass substrate by radio frequency (RF) magnetron sputtering method in confocal configuration at room temperature (RT). Several techniques are used to investigate the effects of… read more here.
Keywords: thin films; power; confocal configuration; azo thin ... See more keywords