Single-shot high speed aerial chromatic confocal metrology sensor
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DOI: 10.1117/1.oe.60.12.124110
Abstract: Abstract. Chromatic confocal metrology is a widely established optical metrology technique, which allows for noncontact, high-speed three-dimensional surface profiling without the need of mechanical depth scanning. However, current methods are limited by the use of… read more here.
Keywords: confocal metrology; shot; metrology; high speed ... See more keywords