Chromatic confocal sensor-based on-machine measurement for microstructured optical surfaces featuring a self-aligned spiral center.
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DOI: 10.1364/oe.488897
Abstract: Chromatic confocal sensor-based on-machine measurement is effective for identifying and compensating for form errors of the ultra-precisely machined components. In this study, an on-machine measurement system was developed for an ultra-precision diamond turning machine to… read more here.
Keywords: machine; sensor based; chromatic confocal; confocal sensor ... See more keywords