Determination of optical constants of thin films in the EUV.
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DOI: 10.1364/ao.447152
Abstract: The determination of fundamental optical parameters is essential for the development of new optical elements such as mirrors, gratings, or photomasks. Especially in the extreme ultraviolet (EUV) and soft x-ray spectral range, the existing databases… read more here.
Keywords: constants thin; determination optical; optical constants; thin films ... See more keywords