Dimpled electrostatic MEMS actuators
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DOI: 10.1063/1.5053597
Abstract: We present electrostatic Micro-Electromechanical System actuators equipped with dimples and contact pads. The introduction of dimples and contact pads is shown to prevent stiction between the actuator and bottom electrodes and minimize dielectric charging and… read more here.
Keywords: mode oscillations; range; dimples contact; tapping mode ... See more keywords