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Published in 2020 at "Journal of Applied Physics"
DOI: 10.1063/1.5143834
Abstract: Although silicon substrate temperature is known to be important in many plasma processes, measuring it involves various difficulties due to the complexity of plasmas. In previous work, the authors proposed an optical-interference contactless thermometer (OICT)…
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Keywords:
interference contactless;
plasma;
temperature;
contactless thermometer ... See more keywords