Mechanism of Ti/Al/Ni/Au ohmic contacts to AlGaN/GaN heterostructures via laser annealing
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DOI: 10.1088/1674-1056/28/3/037302
Abstract: The physical mechanisms of Ti/Al/Ni/Au ohmic contacts to AlGaN/GaN heterostructures by laser annealing and rapid thermal annealing are systematically investigated. The microstructures indicate that a better surface morphology and an intact contact interface are formed… read more here.
Keywords: mechanism; ohmic contacts; contacts algan; algan gan ... See more keywords