Morphological and electrical properties of Nickel based Ohmic contacts formed by laser annealing process on n-type 4H-SiC
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DOI: 10.1016/j.mssp.2019.02.031
Abstract: Abstract This work reports on the morphological and electrical properties of Ni-based back-side Ohmic contacts formed by laser annealing process for SiC power diodes. Nickel films, 100 nm thick, have been sputtered on the back-side of… read more here.
Keywords: morphological electrical; ohmic contacts; process; laser annealing ... See more keywords