Axial diagnosis of electron and negative ion behaviors in capacitively coupled O2-containing Ar plasma driven by 27.12 MHz
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DOI: 10.1063/1.5079256
Abstract: Capacitively coupled O2-containing Ar plasma driven by a radio frequency (RF) of 27.12 MHz has been investigated. The electron energy probability function (EEPF) was measured with a Langmuir probe. The electronegativity was measured with a laser-induced… read more here.
Keywords: plasma driven; plasma; capacitively coupled; containing plasma ... See more keywords